Photoelectric conversion apparatus and imaging system using the same

ABSTRACT

A photoelectric conversion apparatus of the present invention includes a first semiconductor region functioning as a barrier against signal charges between a first and a second photoelectric conversion element, and a second semiconductor region that has a width narrower than that of the first semiconductor region and functions as a barrier against signal charges between a first and the third photoelectric conversion element. A region with a low barrier is provided at least a part between the first and the second photoelectric conversion element.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a division of U.S. application Ser. No. 12/885,677,filed Sep. 20, 2010, the entire disclosure of which is herebyincorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present application relates to a structure of separation of aphotoelectric conversion apparatus.

2. Description of the Related Art

CCD type and CMOS type photoelectric conversion apparatuses are used formany digital cameras and digital camcorders. In recent years, in thephotoelectric conversion apparatuses, pixels have been reduced.Accordingly, measures against mixing of charges to adjacent pixels(crosstalk) have been discussed.

Japanese Patent Application Laid-Open No. 2003-258232 discusses aconfiguration where a P type well region, which functions as an elementisolation barrier to prevent charges from mixing between adjacentpixels, is formed in a deep region consistent with an N type well regionof a photoelectric conversion element.

However, even with the P type well region disclosed in Japanese PatentApplication Laid-Open No. 2003-258232, it may be difficult tosufficiently suppress carrier leakage. In general, in the photoelectricconversion apparatus, a transistor for reading charges from aphotoelectric conversion element is provided around the photoelectricconversion element. It is not necessary that the photoelectricconversion elements are arranged at regular intervals. Further, thewidths of P type well separating the photoelectric conversion elementsmay be different. Accordingly, the inventors of the present inventionhave found out that an amount of signal charge leaking from a certainphotoelectric conversion element to the adjacent photoelectricconversion elements may vary according to the width of such a P typewell region. If the amount of carrier leakage to the adjacentphotoelectric conversion elements varies, image quality is degraded andcorrection by signal processing becomes difficult. If intervals betweenthe photoelectric conversion elements are made to be equalized and thewidths of the P type well regions are also made to be equalized, adegree of freedom of planar layout of transistors for reading signalcharges is decreased and reduction of pixels becomes difficult.

It is an object of the present invention to provide a photoelectricconversion apparatus capable of reducing variation in charges mixinginto the adjacent photoelectric conversion elements (pixels).

SUMMARY OF THE INVENTION

A photoelectric conversion apparatus according to the present inventionincludes: a substrate; a plurality of photoelectric conversion elementsarranged on the substrate; and a transistor arranged on the substratefor transferring a signal charge generated by the photoelectricconversion element, wherein the plurality of photoelectric conversionelements include a first photoelectric conversion element, a secondphotoelectric conversion element adjacent to the first photoelectricconversion element and a third photoelectric conversion element adjacentto the first photoelectric conversion element, and a first region havinga first width is arranged between the first and second photoelectricconversion elements, a second region having a second width narrower thanthe first width is arranged between the first and third photoelectricconversion elements, a first semiconductor region of a firstconductivity type such that the signal charge is minority carrier and ofa third width is arranged in the first region, a second semiconductorregion of the first conductivity type and of a fourth width narrowerthan the third width is arranged in the second region, and a thirdregion at a potential as to the signal charge lower than first region isarranged in the first region.

Other features and advantages of the present invention will be apparentfrom the following description taken in conjunction with theaccompanying drawings, in which like reference characters designate thesame or similar parts throughout the figures thereof.

Further features of the present invention will become apparent from thefollowing description of exemplary embodiments with reference to theattached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a plan view of a photoelectric conversion apparatus of afirst exemplary embodiment.

FIG. 1B is a schematic sectional view of the photoelectric conversionapparatus of the first exemplary embodiment.

FIG. 1C is a schematic sectional view of the photoelectric conversionapparatus of the first exemplary embodiment.

FIG. 2A illustrates an example of a pixel circuit of the photoelectricconversion apparatus.

FIG. 2B is a plan view of the pixel circuit of the photoelectricconversion apparatus.

FIG. 3A is a plan view for illustrating the photoelectric conversionapparatus of the first exemplary embodiment.

FIG. 3B is a schematic sectional view for illustrating the photoelectricconversion apparatus of the first exemplary embodiment.

FIG. 3C is a schematic sectional view for illustrating the photoelectricconversion apparatus of the first exemplary embodiment.

FIG. 4A is a plan view of a photoelectric conversion apparatus of asecond exemplary embodiment.

FIG. 4B is a schematic sectional view of the photoelectric conversionapparatus of the second exemplary embodiment.

FIG. 4C is a schematic sectional view of the photoelectric conversionapparatus of the second exemplary embodiment.

FIG. 5A is a plan view of a photoelectric conversion apparatus forillustrating a modification of the first exemplary embodiment.

FIG. 5B is a schematic sectional view of the photoelectric conversionapparatus for illustrating the modification of the first exemplaryembodiment.

FIG. 5C is a schematic sectional view of the photoelectric conversionapparatus for illustrating the modification of the first exemplaryembodiment.

FIG. 6A is a plan view of a photoelectric conversion apparatus of athird exemplary embodiment.

FIG. 6B is a schematic sectional view of the photoelectric conversionapparatus of the third exemplary embodiment.

FIG. 6C is a schematic sectional view of the photoelectric conversionapparatus of the third exemplary embodiment.

FIG. 7A is a plan view of a photoelectric conversion apparatus forillustrating a modification of the third exemplary embodiment.

FIG. 7B is a schematic sectional view of the photoelectric conversionapparatus for illustrating the modification of the third exemplaryembodiment.

FIG. 7C is a schematic sectional view of the photoelectric conversionapparatus for illustrating the modification of the third exemplaryembodiment.

FIGS. 8A, 8B, 8C, 8D, 8E, 8F and 8G are schematic sectional views forillustrating a method for manufacturing the photoelectric conversionapparatus of the first exemplary embodiment.

FIGS. 9A, 9B, 9C, 9D, 9E, 9F and 9G are schematic sectional views forillustrating a method for manufacturing the photoelectric conversionapparatus of the first exemplary embodiment.

FIG. 10 is a block diagram for illustrating an imaging system.

FIGS. 11A, 11B, 11C, 11D and 11E are potential diagrams illustrating apotential of a path according to a fifth exemplary embodiment.

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate embodiments of the invention and,together with the description, serve to explain the principles of theinvention.

DESCRIPTION OF THE EMBODIMENTS

Preferred embodiments of the present invention will now be described indetail in accordance with the accompanying drawings.

A photoelectric conversion apparatus of the present invention includes afirst semiconductor region, which functions as a barrier against signalcharges, between a first and a second photoelectric conversion element;and a second semiconductor region, which functions as a barrier againstsignal charges and is narrower than the first semiconductor region,between the first and a third photoelectric conversion element. Further,a region with a low barrier (potential barrier) is provided at least apart between the first and the second photoelectric conversion element.This configuration can suppress that signal charges generated in thefirst photoelectric conversion element are unevenly mixed into theadjacent second and third photoelectric conversion elements. That is,the amount of signal charge mixing into the adjacent photoelectricconversion elements can be equalized, thereby improving image quality tobe acquired. Further, when correction is made, an image signal caneasily be corrected. Accordingly, a necessary configuration of an imageprocessor can be simplified.

An embodiment of the present invention is hereinafter described indetail using the figures.

(Example of Pixel Circuit)

An example of a pixel circuit to which the present invention can beapplied is described. FIG. 2A is a circuit diagram of an example of thepixel circuit to which the present invention can be applied. FIG. 2B isa plan view illustrating a planar layout of the pixel circuit for fourpixels. A case where the signal charge is of electrons is describedbelow.

In FIG. 2A, a pixel (PIXEL) includes a photodiode 100, which is aphotoelectric conversion element; a transferring MOS transistor 101; areset MOS transistor 102; an amplifying MOS transistor 103; and aselection MOS transistor 105. The transferring MOS transistor 101transfers signal charges generated in the photoelectric conversionelement 100 to a floating diffusion region 104. The amplifying MOStransistor 103 outputs an output according to a potential of thefloating diffusion region 104 to output line 106 via the selection MOStransistor 105. The amplifying MOS transistor 103 is a part of a sourcefollower circuit. The gate electrode thereof is connected to thefloating diffusion region 104. The reset MOS transistor 102 resets anode of the gate electrode of the amplifying MOS transistor 103, i.e.the floating diffusion region 104, to a prescribed potential (resetpotential). The transferring MOS transistor 101 is supplied with atransfer control signal TX. The reset MOS transistor 102 is suppliedwith a reset control signal RES. The selection MOS transistor 105 issupplied with a selection control signal SEL. Each control signalcontrols the readout of the signal charge. In the photoelectricconversion apparatus, such pixels are arranged one-dimensionally ortwo-dimensionally. This arrangement configures an imaging region.

FIG. 2B illustrates a planar layout of four pixels (pixels a to d). InFIG. 2B, four photodiodes 200 are arranged. A gate electrode 201 is ofthe transferring MOS transistor 101. A gate electrode 202 is of thereset MOS transistor 102. A gate electrode 203 is of the amplifying MOStransistor 103. A gate electrode 205 is of the selection MOS transistor105. There is a floating diffusion region 204. Further, a source region206 is of the reset MOS transistor. A drain region 207 is of the resetMOS transistor and of the amplifying MOS transistor. A source region 208is of the amplifying MOS transistor, and is also a drain region of theselection MOS transistor. A source region 209, which is of the selectionMOS transistor, is connected to the output line 106. Hereinafter, forthe sake of description, the photoelectric conversion elements 200 inFIG. 2B are referred to as a first photoelectric conversion element 200a, a second photoelectric conversion element 200 b, a thirdphotoelectric conversion element 200 c and a fourth photoelectricconversion element 200 d. In a configuration other than that of thephotoelectric conversion element, symbols are assigned only to the pixeld. For example, the gate electrode of the transferring MOS transistorcorresponding to the photoelectric conversion element 200 d isrepresented with reference numeral 201 d. Since configurations areidentical among other pixels, symbols are omitted.

An element isolation region 210 defines active regions 211 and 212. Inthis embodiment, a LOCOS (local oxidation of silicon) structure is usedfor the element isolation region 210 of the elements. However, thestructure may be STI (shallow trench isolation) structure instead.Further, the element isolation region 210 may be a structure where onlya semiconductor region functioning as a barrier against a signal chargeis arranged (diffusion isolation). If the element isolation region 210includes only the semiconductor region functioning as the barrieragainst the signal charges, the active region is defined at a boundarywith the semiconductor region functioning as the barrier against thesignal charge. In FIG. 2B, the active region 211 includes thephotoelectric conversion element 200 and a floating diffusion region204. The active region 212 includes the source region and the drainregion of each transistor. Here, in FIG. 2B, a distance between theactive region 211 a where the photoelectric conversion element 200 a isarranged and the active region 211 b where the photoelectric conversionelement 200 b is arranged, or the width of a first region 213 betweenthe photoelectric conversion elements 200 a and 200 b is represented asa first width W1. A distance between the active region 211 a where thephotoelectric conversion element 200 a is arranged and the active region211 c where the photoelectric conversion element 200 c is arranged, orthe width of a second region 214 between the photoelectric conversionelements 200 a and 200 c is represented as a second width W2. The firstwidth W1 and the second width W2 are different from each other, andW1>W2. Here, the pixels are arranged in a matrix manner along a firstdirection (X axis) and a second direction (Y axis). The first and seconddirections are orthogonal to each other.

The photoelectric conversion apparatus is not limited to the circuit asillustrated in FIG. 2A. The apparatus may be a configuration where alarger number of photoelectric conversion elements share the amplifyingMOS transistor, or a configuration without the selection MOS transistor.Further, the configuration is not limited to the planar layout asillustrated in FIG. 2B. Exemplary embodiments of the present inventionare hereinafter described using the figures.

First Exemplary Embodiment

A photoelectric conversion apparatus of this exemplary embodiment isdescribed using FIGS. 1A to 1G. First, FIG. 1A is a plan viewcorresponding to the plan view of FIG. 2B. In FIG. 1A, symbols forelements similar to those of FIG. 2B are omitted. Symbols are assignedonly to parts characterizing this exemplary embodiment. In FIG. 1A,there are arranged a first semiconductor region 110 and a secondsemiconductor region 111. The regions 110 and 111 are a first conductivetype (P type), where signal charges become a minority carrier, andconfigure barriers against the signal charges (electrons). Morespecifically, the first semiconductor region 110 with a third width W3is arranged in the first region 213. The second semiconductor region 111with a fourth width W4 is arranged in the second region 214. Thesearrangements form potential barriers.

The first semiconductor region 110 is arranged under an active region211 where a transistor is arranged. A third semiconductor region 112 isarranged at a part of the first region 213. The region 112 is the firstconductive type with the third width W3. The third semiconductor region112 has a potential lower than a potential of the first semiconductorregion 110. Because, an impurity concentration of the thirdsemiconductor region 112 is lower than that of the first semiconductorregion 110. More specifically, the third semiconductor region 112 isarranged under the source region 206 of the reset MOS transistor. Thefirst to third semiconductor regions form a grid-like potential barriersurrounding the photoelectric conversion element. Here, the amount ofcharge flowing from the photoelectric conversion element 200 a into thephotoelectric conversion elements 200 b and 200 c can be equalized, byarranging the third semiconductor region 112, while the charge flowingfrom the photoelectric conversion element 200 a into the adjacentphotoelectric conversion elements is suppressed.

The configuration in FIG. 1A is further described using FIGS. 1B and 1C.FIGS. 1B and 1C are schematic sectional views of FIG. 1A taken along XX′and YY′ lines, respectively. In FIGS. 1B and 1C, elements with the sameconfigurations are assigned with the same symbols, and the descriptionthereof is omitted. In FIGS. 1B and 1C, there are a first conductivesubstrate 115, a first conductive type semiconductor region 114 and aplane 119 including a light receiving surface of the photoelectricconversion element. Here, the conductive type of the substrate 115 isarbitrary. The semiconductor region 114 may be the second conductivetype, a layer formed on the substrate 115 by epitaxial growth, or alayer formed by ion implementation into the substrate 115. Withreference to the plane 119, a direction toward the substrate 115 is adepth direction at the substrate. In FIGS. 1B and 1C, the elementisolation region 210 includes a LOCOS structure 113. In FIGS. 1B and 1C,the photoelectric conversion element 200 includes a second conductivetype (N type) charge accumulation region 116 and a P type surfaceprotective layer 117 arranged on a side of the light receiving surface119 of the photoelectric conversion element.

In FIG. 1C, the second semiconductor region 111 has the width W4 and adepth D1. In the sectional view of FIG. 1B, the third semiconductorregion 112 has the width W3 and the depth D1. The first semiconductorregion 110 arranged in the first region 213 has a configuration with thewidth W3 and the depth D1. In this exemplary embodiment, the widths andthe depths of the first semiconductor region 110 and the thirdsemiconductor region 112 arranged in the first region 213 are setidentical to each other. The impurity concentration of the thirdsemiconductor region is set lower than the impurity concentrations ofthe first and second semiconductor regions. The impurity concentrationof the third semiconductor region 112 can appropriately be set by meansof the layout of the photoelectric conversion apparatus and the widthsW3 and W4 of the first semiconductor region.

Here, a flow of the signal charges is described using FIGS. 3A to 3C.FIGS. 3A to 3C are figures corresponding to FIGS. 1A to 1C, and based onFIG. 2B as with FIG. 1A. In FIGS. 3A to 3C, same elements as those inFIGS. 1A to 1C or FIG. 2B are assigned with the same symbols, and thedescription thereof is omitted. The third semiconductor region providedin FIGS. 1A to 1C is not provided in FIGS. 3A to 3C. The firstsemiconductor region 110 and the second semiconductor region 111 areprovided in FIGS. 3A to 3C. In such a configuration, when the signalcharges flow into the adjacent photoelectric conversion elements, thecharges flow via the path 2 with the width W3 passing through the firstsemiconductor region 110, and via the path 3 with the width W4 passingthrough the second semiconductor region 111. Here, since the firstsemiconductor region 110 and the second semiconductor region 111 havethe same impurity concentration and the same depth, the probability thatthe signal charges flow into the adjacent photoelectric conversionelements via the path 3 are higher than that via the path 2.Accordingly, even in the adjacent photoelectric conversion element, amixing amount of signal charge generated in the photoelectric conversionelement 200 a is larger in the photoelectric conversion element 200 cthan that in photoelectric conversion element 200 b, thereby causingunevenness. That is, in a monochrome photoelectric conversion apparatus,unevenness occurs in image quality. In a single panel colorphotoelectric conversion apparatus for a camera, the adjacentphotoelectric conversion element generates a different color signal,thereby causing cross talk (color mixture).

On the other hand, according to the configuration illustrated in FIGS.1A to 1C, since the third semiconductor region with the low impurityconcentration is provided, the path 1 is formed. The signal charges aremore likely to flow into the adjacent photoelectric conversion elementthrough the path 1 than the path 2. The mixing amount of signal chargeto the adjacent photoelectric conversion element that becomes unevenowing to the paths 2 and a path 3 can be adjusted even by the path 1.Here, likelihood of flowing of the signal charges into the adjacentphotoelectric conversion element is determined according to the heightof the potential with respect to the signal charge, i.e. the height ofthe potential barrier. Here, the potential barrier of the path 3 islower than the potential barrier of the path 2. The potential barrier ofthe path 1 is lower than the potential barrier of the path 3. That is,if there is a semiconductor region with a different width functioning asa potential barrier between the photoelectric conversion elements, apart of the potential barrier with a wider width is made to have a lowerpotential barrier. Accordingly, the mixing amount of the signal chargecan be equalized.

In this exemplary embodiment, the third semiconductor region 112 withthe low impurity concentration is arranged in at least one part betweenthe photoelectric conversion elements where the semiconductor regionwith a wide width is arranged. According to such a configuration, thecharges to flow from the photoelectric conversion element 200 a into theadjacent photoelectric conversion element can be suppressed. Further,the amount of charge flowing from the photoelectric conversion element200 a into the photoelectric conversion elements 200 b and 200 c can beequalized. At least one part between the photoelectric conversionelements where the semiconductor region with the wide width is arrangedmay be a part of the semiconductor region with the wide width. That is,a configuration where the third semiconductor region is formed in thefirst semiconductor region may be adopted.

Next, a method for manufacturing the photoelectric conversion apparatusof this exemplary embodiment is described using FIGS. 8A to 8G and 9A to9G. FIGS. 8A to 8G are diagrams illustrating a manufacturing processusing a sectional view corresponding to FIG. 1B. FIGS. 9A to 9G arediagrams illustrating the manufacturing process using a sectional viewcorresponding to FIG. 1C.

First, as illustrated in FIGS. 8A and 9A, N type epitaxial layer 114′ isformed on the N type substrate 115. Next, LOCOS 113 is formed and theactive region is formed (FIGS. 8B and 9B). In FIGS. 8C and 9C, ionimplementation is performed using a photoresist mask, and a P typefourth semiconductor region 120 is formed at an end of the LOCOS 113.

Next, ion implementation of a desired amount of dose is performed usinga photoresist mask, and the P type first semiconductor region 110 andthe second semiconductor region 111 are formed (FIGS. 8D and 9D). Next,ion implementation of a smaller amount of dose than that in FIGS. 8D and9D is performed using another photoresist mask, and the P type thirdsemiconductor region 112 is formed (FIGS. 8E and 9E).

Next, the gate electrode of the transistor is formed by patterning(FIGS. 8F and 9F). Subsequently, the N type charge accumulation region116 and the P type surface protective layer 117 of the photoelectricconversion element are formed, and the source region and the drainregion of the transistor are formed (FIGS. 8G and 9G).

Subsequently, an insulating film and wirings are formed on the lightreceiving surface 119, and inner-layer lenses, color filters and microlenses (not shown) are formed. Thus, the photoelectric conversionapparatus is finished.

The fourth semiconductor region 113 is arranged between the insulator ofthe element isolation region, or LOCOS 113 here, and the photoelectricconversion element 200, and covers the surface of the photoelectricconversion element 200. This fourth semiconductor region 113 enablesmixing of dark current generated in the element isolation region intothe photoelectric conversion element to be reduced.

As an application of this exemplary embodiment, the third semiconductorregion may be provided under the gate electrode of the transistor asillustrated in FIGS. 5A to 5C. FIG. 5A corresponds to FIG. 1A. FIGS. 5Band 5C are schematic sectional views taken along the lines XX′ and YY′in FIG. 5A, respectively. In FIGS. 5A, 5B and 5C, elements similar tothose in FIGS. 1A to 1C are assigned with the same symbols, and thedescription thereof is omitted. In FIGS. 5A, 5B and 5C, the thirdsemiconductor region 512 is provide under the gate electrode 203 of theamplifying MOS transistor, instead of the source region of the reset MOStransistor. Even with such an arrangement, the amount of charge flowingfrom the photoelectric conversion element 200 a into the photoelectricconversion elements 200 b and 200 c can be equalized, while the chargesto flow from the photoelectric conversion element 200 a into theadjacent photoelectric conversion elements are suppressed.

In this exemplary embodiment, the third semiconductor region is providedunder the source region of the reset MOS transistor. Note that, also inthe source region of another transistor, the third semiconductor regionmay be arranged under the drain region.

Second Exemplary Embodiment

A photoelectric conversion apparatus of this exemplary embodiment isdescribed using FIGS. 4A, 4B and 4C. FIG. 4A corresponds to FIG. 1A.FIGS. 4B and 4C are schematic sectional views taken along the lines XX′and YY′ in FIG. 4A, respectively. In FIGS. 4A, 4B and 4C, elementssimilar to those in FIGS. 1A to 1C are assigned with the same symbols,and the description thereof is omitted. Only a configuration in thisexemplary embodiment different from that of the first exemplaryembodiment is hereinafter described.

In the first exemplary embodiment, the part with low potential barrieris formed by the impurity concentration. On the other hand, in thisexemplary embodiment, a part with low potential barrier is formed by thewidth of the semiconductor region forming the potential barrier. Thephotoelectric conversion apparatus of this exemplary embodiment includesthe first semiconductor region 110 with the width W3 and the secondsemiconductor region 111 with the width W4, as with the first exemplaryembodiment. Further, a third semiconductor region 412 of the firstconductive type with a fifth width W5 narrower than the width W4 isprovided. Here, the first semiconductor region 110, the secondsemiconductor region 111 and the third semiconductor region 412 have thesame impurity concentration and the depth D1. In this exemplaryembodiment, a path 4 passing through the third semiconductor region 412is provided instead of the path 3 of the first exemplary embodiment.Accordingly, the mixing amount of signal charge to the adjacentphotoelectric conversion element can evenly be adjusted.

In a case where the semiconductor region with a different width, whichfunctions as the barrier against the signal charges, is thus providedbetween the photoelectric conversion elements as in FIG. 2B, the thirdsemiconductor region 412 with the narrow width is arranged in at least apart of the region with wide width. According to such a configuration,the charges to flow from the photoelectric conversion element 200 a intothe adjacent photoelectric conversion elements can be suppressed.Further, according to this configuration, the amount of charge flowingfrom the photoelectric conversion element 200 a into the photoelectricconversion element 200 b and the amount of charge flowing from thephotoelectric conversion element 200 a into the photoelectric conversionelement 200 c can be equalized.

The process of forming the first to third semiconductor regions issimplified in comparison with the first exemplary embodiment. That is,provided that the shape of the photoresist mask is formed in a desiredform, the first to third semiconductor regions can be formed by the sameion implementation process.

Third Exemplary Embodiment

A photoelectric conversion apparatus of this exemplary embodiment isdescribed using FIGS. 6A, 6B and 6C. FIG. 6A corresponds to FIG. 1A.FIGS. 6B and 6C are schematic sectional views taken along the lines XX′and YY′ in FIG. 6A, respectively. In FIGS. 6A, 6B and 6C, elementssimilar to those in FIGS. 1A to 1C are assigned with the same symbols,and the description thereof is omitted. Only a configuration in thisexemplary embodiment different from that of the first exemplaryembodiment is hereinafter described.

In the first exemplary embodiment, the part with low potential barrieris formed by the impurity concentration. On the other hand, in thisexemplary embodiment, there is a part where the semiconductor regionforming the potential barrier is not provided, thereby a part with lowpotential barrier is formed. The photoelectric conversion apparatus ofthis exemplary embodiment includes the first semiconductor region 110and the second semiconductor region 111, as with the first exemplaryembodiment. A third region 612 without the first conductive typesemiconductor region is formed in the region 212 where the firstsemiconductor region 110 is arranged. Here, the first semiconductorregion 110 and the second semiconductor region 111 have the sameimpurity concentration, and the same depth D1. As shown in FIG. 6B, apath 5 passing through the third region 612 is provided instead of thepath 3 of the first exemplary embodiment. Accordingly, the mixing amountof signal charge to the adjacent photoelectric conversion element canuniformly be adjusted.

Table 1 illustrates a comparison of mixing amounts of signal charge tothe adjacent photoelectric conversion elements in the configurations inFIGS. 6A to 6C and 3A to 3C. The mixing amount of signal charge from thephotoelectric conversion element 200 a to the photoelectric conversionelement 200 c is represented as a mixing amount of charge 1. The mixingamount of signal charge from the photoelectric conversion element 200 ato the photoelectric conversion element 200 b is represented as themixing amount of charge 2. The unit of the mixing amounts of charge isarbitrary. As represented in Table 1, the configuration in FIGS. 6A to6C reduces the difference between the mixing amounts of charge 1 and 2.The difference between the mixing amounts of charge 1 and 2 can furtherbe reduced by thorough consideration in designing.

TABLE 1 MIXING AMOUNT OF MIXING AMOUNT OF CHARGE 1 CHARGE 2 FIG. 6 10095 FIG. 3 100 64

In the case where the semiconductor region with different widthfunctioning as the barrier against the signal charge is thus arrangedbetween the photoelectric conversion elements as in FIG. 2B, at least apart of the semiconductor region with the wide width is chipped (notprovided). According to such a configuration, the charges to flow fromthe photoelectric conversion element 200 a to the adjacent photoelectricconversion elements can be suppressed. Further, the amount of chargeflowing from the photoelectric conversion element 200 a into thephotoelectric conversion element 200 b and the amount of charge flowingfrom the photoelectric conversion element 200 a into the photoelectricconversion element 200 c can be equalized.

As shown in FIGS. 7A to 7C, a region 712 corresponding to the region 612may be arranged under the source region or the drain region of thetransistor. In this case, the region may be arranged under the sourceregion, the drain region or the semiconductor region to which a fixedpotential, such as a power source or a ground, is supplied. Thisarrangement enables dark current generated in LOCOS to be drained intothe source region, drain region or the semiconductor region.Accordingly, the dark current flowing into the photoelectric conversionelement can be reduced.

In this exemplary embodiment, the process of forming the first andsecond semiconductor regions and the third region 612 is simplified incomparison with the first exemplary embodiment. That is, as to the maskpattern of the ion implementation for forming the first and secondsemiconductor regions, a pattern where no opening is provided in thethird region 612 is used. Accordingly, the first and secondsemiconductor regions and the region 612 of this exemplary embodimentcan be formed.

Fourth Exemplary Embodiment

An exemplary embodiment in a case of applying the photoelectricconversion apparatus of the present invention as an imaging apparatus tothe imaging system is described in detail. The imaging systems include adigital camera, a digital camcorder and a monitor camera. FIG. 10illustrates a block diagram in a case of applying the photoelectricconversion apparatus to the digital camera as an example of the imagingsystem.

In FIG. 10, the system includes a barrier 1 for protecting a lens, alens 2 forming an optical image of a subject at the imaging apparatus 4(photoelectric conversion apparatus), and a diaphragm 3 for changing theamount of light passing through the lens 2. The system also includes anA/D converter 6 performing analog/digital conversion on image signaloutput from the imaging apparatus 4, and a signal processing unit 7applying various corrections to the image data output from the A/Dconverter 6 and compressing the same data. In FIG. 10, the systemfurther includes a timing generator 8 outputting various timing signalsto the imaging apparatus 4, the image signal processing circuit 5, theA/D converter 6 and the signal processing unit 7. The system includes awhole controlling and arithmetic operation unit 9 that performs variousoperations and totally controls the digital camera. The system includesa memory unit 10 for temporarily storing the image data, an interface 11for recording and reading a data on or from the recording medium, and adetachable recording medium 12, such as a semiconductor memory, forrecording and reading the image data. Further, the system includes aninterface 13 for communicating with an external computer. Here, thetiming signal may be input from the outside. The imaging system mayinclude at least the imaging apparatus 4 and the signal processing unit7 processing the image signal output from the imaging apparatus. Thetiming generator or the A/D converter may be formed on the samesubstrate as that of the imaging apparatus. As described above, thephotoelectric conversion apparatus of the present invention may beapplied to the imaging system. A high quality image can be acquired byapplying the photoelectric conversion apparatus of the present inventionto the imaging system.

Fifth Exemplary Embodiment

Herein, referring to FIGS. 11A to 11E, potential configuration in eachpath is described as follow. FIG. 11A illustrates schematically apotential configuration as to a signal charge (electron herein) in thepath 1 in FIG. 1B. FIG. 11B illustrates schematically a potentialconfiguration as to the signal charge in the path 2 in FIG. 3B. FIG. 11Cillustrates schematically a potential configuration as to the signalcharge in the path 4 in FIG. 4B. FIG. 11D illustrates schematically apotential configuration as to the signal charge in the path 5 in FIG.6B. FIG. 11E illustrates schematically a potential configuration as tothe signal charge in the path 3 in FIG. 1C.

Firstly, in the path 1 in FIG. 11A, a potential P1 in the chargeaccumulation region 116 of N type semiconductor region is at a loweststate as to the electron. A potential P2 in the semiconductor region 114of P type is higher than the potential P1. A potential P3 in the thirdsemiconductor region 112 of the width W3 is higher than the potentialP2.

In the path 2 in FIG. 11B, a potential P4 in the first semiconductorregion 110 of the width W3 is higher than the potential P3. Thus, ratherthan the potential of the first semiconductor region 110, the potentialof the third semiconductor region 112 is lower.

In the path 3 in FIG. 11D, the second semiconductor region 111 of thewidth W4 narrower than W3 is at the potential P4. Herein, comparing thepath 2 with the path 3, the first semiconductor region 110 in the path 2is at the same potential 4 as the potential of the second semiconductorregion 111 in the path 3. However, the first semiconductor region 110 inthe path 2 has the width W3 broader than the width of the secondsemiconductor region 111 in the path 3. Accordingly, the signal chargeis hardly transported through or over the path 2 rather than the path 3.Next, comparing the path 1 with the path 2, the third semiconductorregion 112 in the path 1 has the same width W3 as that of the firstsemiconductor region 110 in the path 2. However, the third semiconductorregion 112 in the path 1 is at the potential P3 lower than the potentialof the first semiconductor region 110 in the path 2. Accordingly, thesignal charge is easily transported through or over the path 1 ratherthan the path 2. At that state, by means of a configuration that thefirst region has at a part thereof a lower potential region such as thepath 1, for example a configuration such that a part of the firstsemiconductor region 110 is replaced with the third semiconductor region112, a quantity of mixing of the signal charge can be adjusted. Inparticular, comparing the third semiconductor region 112 of the width W3and the potential P3 with the second semiconductor region 111 of thewidth W4 and the potential P4, it would be advantageous to set theimpurity concentration and with of the semiconductor regions such thatthe signal charge can easily be transported through the thirdsemiconductor region 112 rather than the second semiconductor region111.

Next, in the path 4 in FIG. 11C, the third semiconductor region 412 hasa width W5 narrower than the width W4, and is at the potential P4.Herein, comparing the path 2 with the path 4, the first semiconductorregion 110 in the path 2 is at the same potential P4 as that of thethird semiconductor region 412 in the path 4. However, the firstsemiconductor region 110 in the path 2 has a width W3 broader than thatof the third semiconductor region 412 in the path 4. That is, the signalcharge is easily transported through or over the path 4 rather than thepath 2. Moreover, comparing the path 4 with the path 3, the thirdsemiconductor region 412 in the path 4 is at the same potential P4 asthat of the second semiconductor region 111 in the path 3. However, thethird semiconductor region 412 in the path 4 has the width W5 narrowerthan that of the second semiconductor region 111 in the path 3.Accordingly, the signal charge is easily transported through or over thepath 4 rather than the path 3. By means of such configuration that thepath 4 is a part of the first region, that is, the first semiconductorregion 110 is partially replaced with the third semiconductor region412, the quantity of mixing the signal charge can be adjusted.

Referring to FIG. 11D, comparing the path 5 with the path 2, the firstsemiconductor region 110 in the path is at the potential P4. While, thethird semiconductor region 612 in the path 5 is at the potential P2.Accordingly, the signal charge is easily transported through the path 5rather than the path 2. Next, comparing the path 5 with the path 3, thesecond semiconductor region 111 in the path 3 is at the potential P4.While, the third semiconductor region 612 in the path 5 is at thepotential P2. Accordingly, the signal charge is easily transportedthrough the path 5 rather than the path 3. By means of a configurationsuch that the path 5 is a part of the first region, that is, the firstsemiconductor region 110 is partially replaced with the thirdsemiconductor region 612, the quantity of mixing the signal charge canbe adjusted.

As described above, in the case of arranging the semiconductor regionwith a different width functioning as a barrier (potential barrier)against the signal charges between the photoelectric conversionelements, the barrier at least one part of the semiconductor region withthe wide width is made to be low. This configuration can suppress thatthe signal charges generated in a certain photoelectric conversionelement are unevenly mixed into any photoelectric conversion elementamong the adjacent photoelectric conversion elements.

Here, the configuration reducing a part of potential is a configurationwhere a part of impurity concentration of the semiconductor regionfunctioning as a barrier is reduced, the width is narrowed or the depthis reduced, or a configuration where a part of the semiconductor regionfunctioning as the barrier is not provided. These configurations andeach exemplary embodiment may appropriately be combined. An appropriatedesign can be made by estimating a balance of amounts of flow into theadjacent photoelectric conversion elements.

While the present invention has been described with reference toexemplary embodiments, it is to be understood that the invention is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all such modifications and equivalent structures andfunctions.

This application claims the benefit of Japanese Patent Application No.2009-219218, filed Sep. 24, 2009, and Japanese Patent Application No.2010-185290 filed Aug. 20, 2010, which are hereby incorporated byreference herein in their entirety.

What is claimed is:
 1. A photoelectric conversion apparatus comprising:a first photoelectric conversion element having a semiconductor regionof a first conductivity type capable of accumulating a signal charge; asecond photoelectric conversion element adjacent to the firstphotoelectric conversion element along a first direction, the secondphotoelectric conversion element having a semiconductor region of thefirst conductivity type; a third photoelectric conversion elementadjacent to the first photoelectric conversion element along a seconddirection that crosses the first direction, the third photoelectricconversion element having a semiconductor region of the firstconductivity type; a first semiconductor region of a second conductivitytype opposite to the first conductivity type arranged between thesemiconductor region of the first conductivity type of the firstphotoelectric conversion element and the semiconductor region of thefirst conductivity type of the second photoelectric conversion element,the first semiconductor region having a first width; a secondsemiconductor region of the second conductivity type arranged betweenthe semiconductor region of the first conductivity type of the firstphotoelectric conversion element and the semiconductor region of thefirst conductivity type of the third photoelectric conversion element,the second semiconductor region having a second width narrower than thefirst width; and a third semiconductor region arranged adjacent to thefirst semiconductor region along a third direction crossing the firstdirection, and arranged between the semiconductor region of the firstconductivity type of the first photoelectric conversion element and thesemiconductor region of the first conductivity type of the secondphotoelectric conversion element, the third semiconductor region havinga potential for the signal charge lower than that of the firstsemiconductor region.
 2. The photoelectric conversion apparatusaccording to claim 1, wherein the first and second directions areorthogonal to each other.
 3. The photoelectric conversion apparatusaccording to claim 1, wherein the third semiconductor region has thesecond conductivity type.
 4. The photoelectric conversion apparatusaccording to claim 3, wherein the third semiconductor region has a thirdwidth narrower than the second width.
 5. The photoelectric conversionapparatus according to claim 3, wherein the third semiconductor regionhas an impurity concentration lower than an impurity concentration ofthe second semiconductor region.
 6. The photoelectric conversionapparatus according to claim 3, wherein the third semiconductor regionis arranged at a depth shallower than a depth of the secondsemiconductor region.
 7. The photoelectric conversion apparatusaccording to claim 3, wherein the third and fourth semiconductor regionsform a continuous semiconductor region.
 8. The photoelectric conversionapparatus according to claim 1, further comprising: a fourthsemiconductor region, in which the semiconductor region of the firstconductivity type of the first photoelectric conversion element, thesemiconductor region of the first conductivity type of the secondphotoelectric conversion element, the second semiconductor region andthe third semiconductor region are arranged.
 9. The photoelectricconversion apparatus according to claim 1, further comprising: colorfilters each arranged correspondingly to each of the first, second andthird photoelectric conversion elements, wherein the color filtercorresponding to the first photoelectric conversion element has a colorthat is different from the colors of the color filters corresponding tothe second and third photoelectric conversion elements.
 10. An imagingsystem comprising: a photoelectric conversion apparatus according toclaim 1; and a signal processing circuit configured to process a signaloutputted from the photoelectric conversion apparatus.
 11. Thephotoelectric conversion apparatus according to claim 1, furthercomprising a transistor, wherein at least a part of the transistor isarranged in the first semiconductor region.
 12. The photoelectricconversion apparatus according to claim 1, further comprising atransistor, wherein at least a part of the transistor is arranged in thethird semiconductor region.
 13. The photoelectric conversion apparatusaccording to claim 1, wherein the first semiconductor region, the secondsemiconductor region and the third semiconductor region form a grid-likeconfiguration in a planar view.
 14. The photoelectric conversionapparatus according to claim 1, wherein the third semiconductor regionextends from the semiconductor region of the first conductivity type ofthe first photoelectric conversion element to the semiconductor regionof the first conductivity type of the second photoelectric conversionelement.
 15. A photoelectric conversion apparatus comprising: asemiconductor substrate; a first photoelectric conversion element,including a semiconductor region of a first conductivity type capable ofaccumulating a signal charge, the semiconductor region formed in thesemiconductor substrate; a second photoelectric conversion elementadjacent to the first photoelectric conversion element along a firstdirection, including a semiconductor region of the first conductivitytype, the semiconductor region formed in the semiconductor substrate; athird photoelectric conversion element adjacent to the firstphotoelectric conversion element along a second direction different fromthe first direction, including a semiconductor region of the firstconductivity type, the semiconductor region formed in the semiconductorregion formed in the semiconductor substrate; a first semiconductorregion of a second conductivity type opposite to the first conductivitytype formed in the semiconductor substrate, arranged between thesemiconductor region of the first conductivity type of the firstphotoelectric conversion element and the semiconductor region of thefirst conductivity type of the second photoelectric conversion element,the first semiconductor region having a first width; a secondsemiconductor region of the second conductivity type formed in thesemiconductor substrate, arranged between the semiconductor region ofthe first conductivity type of the first photoelectric conversionelement and the semiconductor region of the first conductivity type ofthe third photoelectric conversion element, the second semiconductorregion having a second width narrower than the first width; and aportion for a charge path between the semiconductor region of the firstconductivity type of the first photoelectric conversion element and thesemiconductor region of the first conductivity type of the secondphotoelectric conversion element, the portion being arranged adjacent tothe first semiconductor region along a direction across the firstdirection, the portion extending from the semiconductor region of thefirst conductivity type of the first photoelectric conversion element tothe semiconductor region of the first conductivity type of the secondphotoelectric conversion element.
 16. The photoelectric conversionapparatus according to claim 15, wherein the first and second directionsare orthogonal to each other.
 17. The photoelectric conversion apparatusaccording to claim 15, further comprising: color filters each arrangedcorrespondingly to each of the first, second and third photoelectricconversion elements, wherein the color filter corresponding to the firstphotoelectric conversion element has a color that is different from thecolors of the color filters corresponding to the second and thirdphotoelectric conversion elements.
 18. An imaging system comprising: aphotoelectric conversion apparatus according to claim 15; and a signalprocessing circuit configured to process a signal outputted from thephotoelectric conversion apparatus.
 19. The photoelectric conversionapparatus according to claim 15, further comprising a transistor,wherein at least a part of the transistor is arranged in the firstsemiconductor region.
 20. The photoelectric conversion apparatusaccording to claim 15, further comprising a transistor, wherein at leasta part of the transistor is arranged in the portion.
 21. Thephotoelectric conversion apparatus according to claim 15, wherein thefirst semiconductor region, the second semiconductor region and thethird semiconductor region form a grid-like configuration in a planarview.
 22. A photoelectric conversion apparatus comprising: a firstphotoelectric conversion element having a semiconductor region of afirst conductivity type capable of accumulating a signal charge; asecond photoelectric conversion element adjacent to the firstphotoelectric conversion element along a first direction, the secondphotoelectric conversion element having a semiconductor region of thefirst conductivity type; a third photoelectric conversion elementadjacent to the first photoelectric conversion element along a seconddirection that crosses the first direction, the third photoelectricconversion element having a semiconductor region of the firstconductivity type; a first semiconductor region of a second conductivitytype opposite to the first conductivity type arranged between thesemiconductor region of the first conductivity type of the firstphotoelectric conversion element and the semiconductor region of thefirst conductivity type of the second photoelectric conversion element,the first semiconductor region having a first width; a secondsemiconductor region of the second conductivity type arranged betweenthe semiconductor region of the first conductivity type of the firstphotoelectric conversion element and the semiconductor region of thefirst conductivity type of the third photoelectric conversion element,the second semiconductor region having a second width narrower than thefirst width; and a third semiconductor region of the second conductivitytype arranged adjacent to the first semiconductor region along a thirddirection crossing the first direction, and arranged between thesemiconductor region of the first conductivity type of the firstphotoelectric conversion element and the semiconductor region of thefirst conductivity type of the second photoelectric conversion element,the third semiconductor region having an impurity concentration lowerthan an impurity concentration of the second semiconductor region. 23.The photoelectric conversion apparatus according to claim 22, wherein inplanar layout, the semiconductor region of the first conductivity typeof the first photoelectric conversion element is surrounded by the firstsemiconductor region, the second semiconductor region, and the thirdsemiconductor region.
 24. The photoelectric conversion apparatusaccording to claim 22, wherein, in planar layout, the semiconductorregion of the first conductivity type of the first photoelectricconversion element has a first side and a second side crossing the firstside, the first semiconductor region and the third semiconductor regionare arranged along the first side, and the second semiconductor regionis arranged along the second side.
 25. The photoelectric conversionapparatus according to claim 22, further comprising a transistor,wherein at least a part of the transistor is arranged in the firstsemiconductor region.
 26. The photoelectric conversion apparatusaccording to claim 22, further comprising a transistor, wherein at leasta part of the transistor is arranged in the third semiconductor region.27. The photoelectric conversion apparatus according to claim 22,wherein the first semiconductor region, the second semiconductor regionand the third semiconductor region form a grid-like shape in a planarview.
 28. The photoelectric conversion apparatus according to claim 22,wherein the third semiconductor region extends from the semiconductorregion of the first conductivity type of the first photoelectricconversion element to the semiconductor region of the first conductivitytype of the second photoelectric conversion element.